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Nucleation and formation of oxygen precipitates in Czochralski grown silicon annealed under uniform stress conditions
I.V. Antonova, A. Misiuk, V.P. Popov, A.E. Plotnikov, B. SurmaVolume:
253
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0921-4526(98)00372-x
File:
PDF, 542 KB
english, 1998