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X-ray scattering study of interface roughness correlation in Mo/Si and Ti/C multilayers for X-UV optics
M. Jergel, V. Holý, E. Majková, Š. Luby, R. Senderák, H.J. Stock, D. Menke, U. Kleineberg, U. HeinzmannVolume:
253
Year:
1998
Language:
english
Pages:
12
DOI:
10.1016/s0921-4526(98)00385-8
File:
PDF, 208 KB
english, 1998