Annealing of ion-implanted GaN

Annealing of ion-implanted GaN

A Burchard, E.E Haller, A Stötzler, R Weissenborn, M Deicher
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Volume:
273-274
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0921-4526(99)00415-9
File:
PDF, 200 KB
english, 1999
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