Oxygen and peculiarities of its precipitation in Si1−xGex
L.I. Khirunenko, M.G. Sosnin, N.V. Abrosimov, M. Höhne, W. Shröder, Yu.V. PomozovVolume:
273-274
Year:
1999
Language:
english
Pages:
3
DOI:
10.1016/s0921-4526(99)00451-2
File:
PDF, 103 KB
english, 1999