Oxygen precipitation in nitrogen-doped Czochralski silicon
Deren Yang, Xiangyang Ma, Ruixin Fan, Jinxin Zhang, Liben Li, Duanlin QueVolume:
273-274
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(99)00453-6
File:
PDF, 156 KB
english, 1999