Impurity effects in silicon implanted with rare-earth ions

Impurity effects in silicon implanted with rare-earth ions

V.V Emtsev, V.V Emtsev Jr., D.S Poloskin, E.I Shek, N.A Sobolev, J Michel, L.C Kimerling
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Volume:
273-274
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(99)00473-1
File:
PDF, 109 KB
english, 1999
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