Formation of copper precipitates in silicon

Physica B: Condensed Matter 1999 Vol. 273-274; Iss. none

Formation of copper precipitates in silicon

Christoph Flink, Henning Feick, Scott A McHugo, Amna Mohammed, Winfried Seifert, Henry Hieslmair, Thomas Heiser, Andrei A Istratov, Eicke R Weber
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Volume:
273-274
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(99)00499-8
File:
PDF, 88 KB
english, 1999
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