Electron irradiation of heavily doped silicon: group-III impurity ion pairs
V.V Emtsev, P Ehrhart, D.S Poloskin, U DedekVolume:
273-274
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(99)00506-2
File:
PDF, 128 KB
english, 1999