Impurity-assisted annealing of point defect complexes in ion- implanted silicon
Paolo Pellegrino, Andrej Yu Kuznetsov, Bengt G. SvenssonVolume:
273-274
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(99)00532-3
File:
PDF, 128 KB
english, 1999