Low-temperature spreading-resistance profiling for the characterization of impurity distributions in germanium
S Voss, H Bracht, N.A StolwijkVolume:
273-274
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(99)00573-6
File:
PDF, 109 KB
english, 1999