Investigation of ion-bombardment effects on the formation of voids during deposition of a-Ge : H
Z.L. Peng, D. Comedi, F. Dondeo, I. Chambouleyron, P.J. Simpson, P. MascherVolume:
273-274
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0921-4526(99)00578-5
File:
PDF, 131 KB
english, 1999