Effect of grown-in biaxial strain on deep level defects in Si1−yCy/Si epitaxial heterostructures
D.V. Singh, T.O. Mitchell, J.L. Hoyt, J.F. Gibbons, N.M. Johnson, W.K. GötzVolume:
273-274
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-4526(99)00603-1
File:
PDF, 113 KB
english, 1999