[IEEE 2014 IEEE Industry Applications Society Annual Meeting - Vancouver, BC (2014.10.5-2014.10.9)] 2014 IEEE Industry Application Society Annual Meeting - Application of a plasma Arc lamp for thermal processing of semiconductor wafers
Grover, Harpreet Singh, Dawson, Francis P., Camm, Dave M., Cressault, Yann, Lieberer, MarkusYear:
2014
Language:
english
DOI:
10.1109/IAS.2014.6978430
File:
PDF, 992 KB
english, 2014