[IEEE 6th International Conference on Solid-State and IC...

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[IEEE 6th International Conference on Solid-State and IC Technology - Shanghai, China (22-25 Oct. 2001)] 2001 6th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.01EX443) - Design and simulation of a novel micromachined comb-gimbal gyroscope

Lufeng Che,, Xin Li,, Bin Xiong,, Yao Chen,, Yuelin Wang,
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Volume:
2
Year:
2001
Language:
english
DOI:
10.1109/ICSICT.2001.982021
File:
PDF, 148 KB
english, 2001
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