Application of a Plasma Arc Lamp for Thermal Processing of Semiconductor Wafers
Grover, Harpreet Singh, Dawson, Francis P., Camm, Dave M., Cressault, Yann, Lieberer, MarkusVolume:
51
Language:
english
Journal:
IEEE Transactions on Industry Applications
DOI:
10.1109/TIA.2015.2451085
Date:
November, 2015
File:
PDF, 1.20 MB
english, 2015