Determination of the layered structure in Mo/Si multilayers...

Physica B: Condensed Matter 2000 Vol. 283; Iss. 1-3

Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry

A.E Yakshin, E Louis, P.C Görts, E.L.G Maas, F Bijkerk
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Volume:
283
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0921-4526(99)01909-2
File:
PDF, 190 KB
english, 2000
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