Microfabrication of silicon vibrating wires

Microfabrication of silicon vibrating wires

S Triqueneaux, E Collin, D.J Cousins, T Fournier, C Bäuerle, Yu.M Bunkov, H Godfrin
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
284-288
Year:
2000
Language:
english
Pages:
2
DOI:
10.1016/s0921-4526(99)03063-x
File:
PDF, 110 KB
english, 2000
Conversion to is in progress
Conversion to is failed