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Microfabrication of silicon vibrating wires
S Triqueneaux, E Collin, D.J Cousins, T Fournier, C Bäuerle, Yu.M Bunkov, H GodfrinVolume:
284-288
Year:
2000
Language:
english
Pages:
2
DOI:
10.1016/s0921-4526(99)03063-x
File:
PDF, 110 KB
english, 2000