SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachined Devices and Components IV - Microassembly technologies for MEMS
Cohn, Michael B., Boehringer, Karl F., Noworolski, J. Mark, Singh, Angad, Keller, Chris G., Goldberg, Kenneth A., Howe, Roger T., French, Patrick J., Chau, Kevin H.Volume:
3514
Year:
1998
Language:
english
DOI:
10.1117/12.323891
File:
PDF, 1.82 MB
english, 1998