Out-of-plane buckled cantilever microstructures with...

Micro & Nano Letters 2015 / 10 Vol. 10; Iss. 10

Out-of-plane buckled cantilever microstructures with adjustable angular positions using thermal bimorph actuation for transducer applications

Castro, David, Diaz, Marlon, Arevalo, Arpys, Conchouso, David, Foulds, Ian G.
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Volume:
10
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2015.0198
Date:
October, 2015
File:
PDF, 515 KB
english, 2015
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