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[IEEE 2015 International 3D Systems Integration Conference (3DIC) - Sendai, Japan (2015.8.31-2015.9.2)] 2015 International 3D Systems Integration Conference (3DIC) - Characterization of stress distribution in ultra-thinned DRAM wafer

Nakamura, Tomoji, Mizushima, Yoriko, Young Suk Kim,, Sugie, Ryuichi, Ohba, Takayuki
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Year:
2015
Language:
english
DOI:
10.1109/3DIC.2015.7334558
File:
PDF, 2.18 MB
english, 2015
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