SPIE Proceedings [SPIE Photomask Japan '94 - Kawasaki City,...

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SPIE Proceedings [SPIE Photomask Japan '94 - Kawasaki City, Kanagawa, Japan (Friday 22 April 1994)] Photomask and X-Ray Mask Technology - New method of critical dimension (CD) control for 64-Mbit-DRAM reticles

Uraguchi, Masahiro, Hasegawa, Hideaki, Yamamoto, Yuhichi, Kanemitsu, Hideyuki, Hoshino, Eiichi, Morishige, Akira, Yoshihara, Hideo
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Volume:
2254
Year:
1994
Language:
english
DOI:
10.1117/12.191946
File:
PDF, 699 KB
english, 1994
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