Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2015 / 12 Vol. 365
Comparison of silicon and 4H silicon carbide patterning using focused ion beams
Veerapandian, S.K.P., Beuer, S., Rumler, M., Stumpf, F., Thomas, K., Pillatsch, L., Michler, J., Frey, L., Rommel, M.Volume:
365
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2015.07.079
Date:
December, 2015
File:
PDF, 1.01 MB
english, 2015