Processing grating structures on surfaces of wide-bandgap...

Optical Engineering 2015 / 12 Vol. 54; Iss. 12

Processing grating structures on surfaces of wide-bandgap semiconductors using femtosecond laser and phase mask

Gao, Bo, Chen, Tao, Cui, Wei, Li, Cunxia, Si, Jinhai, Hou, Xun
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Volume:
54
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.OE.54.12.126106
Date:
December, 2015
File:
PDF, 894 KB
english, 2015
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