SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Soft X-Ray and EUV Imaging Systems II - Improved reflectance and stability of Mo/Si multilayers
Bajt, Sasa, Alameda, Jennifer B., Barbee, Jr., Troy W., Clift, W. Miles, Folta, James A., Kaufmann, Benjamin B., Spiller, Eberhard A., Tichenor, Daniel A., Folta, James A.Volume:
4506
Year:
2001
Language:
english
DOI:
10.1117/12.450946
File:
PDF, 131 KB
english, 2001