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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Micro- and Nanometrology in Microsystems Technology II - Accurate three-dimensional detection of micro-particles by means of digital holographic microscopy

Antkowiak, Maciej, Callens, Natacha, Schockaert, Cédric, Yourassowsky, Catherine, Dubois, Frank, Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang
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Volume:
6995
Year:
2008
Language:
english
DOI:
10.1117/12.781210
File:
PDF, 858 KB
english, 2008
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