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Evidence of stress relaxation in thermally grown oxide layers—experiments and modelling
A.M. Huntz, A. Piant, J.L. Lebrun, S. DaghighVolume:
248
Year:
1998
Language:
english
Pages:
12
DOI:
10.1016/s0921-5093(98)00519-x
File:
PDF, 314 KB
english, 1998