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Characteristics of material surfaces modified using plasma-enhanced ion beams
X.D. Peng, A. Kharlov, V. Bystritski, E. Garate, E.J. LaverniaVolume:
251
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0921-5093(98)00623-6
File:
PDF, 803 KB
english, 1998