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Ion beam deposition and surface characterization of thin multi-component oxide films during growth
A.R. Krauss, J. Im, V. Smentkowski, J.A. Schultz, O. Auciello, D.M. Gruen, J. Holocek, R.P.H. ChangVolume:
253
Year:
1998
Language:
english
Pages:
13
DOI:
10.1016/s0921-5093(98)00730-8
File:
PDF, 353 KB
english, 1998