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Relaxation and recovery of extrinsic stress in sputtered titanium–nickel thin films on (100)-Si
David S Grummon, Jinping Zhang, Thomas J PenceVolume:
273-275
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0921-5093(99)00404-9
File:
PDF, 241 KB
english, 1999