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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] MOEMS and Miniaturized Systems XII - Wide steering angle microscanner based on curved surface
Sabry, Yasser, Piyawattanametha, Wibool, Park, Yong-Hwa, Khalil, Diaa, Saadany, Bassam, Bourouina, TarikVolume:
8616
Year:
2013
Language:
english
DOI:
10.1117/12.2003000
File:
PDF, 411 KB
english, 2013