SPIE Proceedings [SPIE Optics and Measurement Conference 2014 - Liberec, Czech Republic (Tuesday 7 October 2014)] Optics and Measurement Conference 2014 - Advanced interferometry systems for dimensional measurement in nanometrology
Kovačičinová, Jana, Vít, Tomáš, Lazar, Josef, Hola, Miroslava, Hrabina, Jan, Oulehla, Jindřich, Číp, Ondřej, Vychodil, Miloslav, Sedlář, Petra, Provazník, MilanVolume:
9442
Year:
2015
Language:
english
DOI:
10.1117/12.2086613
File:
PDF, 7.59 MB
english, 2015