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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Fault simulation of MEMS using HDLs
Charlot, Benoit, Mir, Salvador, Cota, Erika F., Lubaszewski, Marcelo, Courtois, Bernard, Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341215
File:
PDF, 1.64 MB
english, 1999