Effects of oxygen coimplantation on the formation of donor...

Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

V.V. Emtsev Jr, D.S. Poloskin, E.I. Shek, N.A. Sobolev, L.C. Kimerling
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Volume:
81
Year:
2001
Language:
english
Pages:
3
DOI:
10.1016/s0921-5107(00)00739-x
File:
PDF, 91 KB
english, 2001
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