Oxygen precipitation in floating-zone silicon grown in...

Materials Science and Engineering: B 2001 Vol. 83; Iss. 1-3

Oxygen precipitation in floating-zone silicon grown in hydrogen ambience and its application

Huaixiang Li, Chuanbo Li, Yuejiao He, Guirong Liu, Yansheng Chen, Shuzhen Duan
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Volume:
83
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(01)00502-5
File:
PDF, 148 KB
english, 2001
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