The impact of layer thickness of IMP-deposited tantalum...

The impact of layer thickness of IMP-deposited tantalum nitride films on integrity of Cu/TaN/SiO2/Si multilayer structure

Khin Maung Latt, Y.K Lee, S Li, T Osipowicz, H.L Seng
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Volume:
84
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0921-5107(01)00618-3
File:
PDF, 708 KB
english, 2001
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