Self-organized technology of anisotropic etching of semiconductors for optoelectronics application
N.L Dmitruk, O.Yu Borkovskaya, O.I Mayeva, G.Ya Kolbasov, I.B MamontovaVolume:
88
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(01)00878-9
File:
PDF, 323 KB
english, 2002