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Microstructure and electrophysical properties of SnO2, ZnO and In2O3 nanocrystalline films prepared by reactive magnetron sputtering
A.S Ryzhikov, R.B Vasiliev, M.N Rumyantseva, L.I Ryabova, G.A Dosovitsky, A.M Gilmutdinov, V.F Kozlovsky, A.M GaskovVolume:
96
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0921-5107(02)00378-1
File:
PDF, 368 KB
english, 2002