Conditions of ICP for a superconducting flux flow...

Materials Science and Engineering: B 2003 Vol. 102; Iss. 1-3

Conditions of ICP for a superconducting flux flow transistor and its etching characteristics

Hyeong-Gon Kang, Sung-Hun Lim, Byoung-Sung Han, Hyo-Sang Choi, Yoon-Bong Hahn
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Volume:
102
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(02)00616-5
File:
PDF, 252 KB
english, 2003
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