Silicon micromachined sensor for gas detection

Materials Science and Engineering: B 2003 Vol. 101; Iss. 1-3

Silicon micromachined sensor for gas detection

Carmen Moldovan, Lavinia Hinescu, Mihail Hinescu, Rodica Iosub, Mihai Nisulescu, Bogdan Firtat, Mircea Modreanu, Dan Dascalu, Victor Voicu, Cornel Tarabasanu
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Volume:
101
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(02)00668-2
File:
PDF, 440 KB
english, 2003
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