Effect of ion energy and dose on the positioning of...

Materials Science and Engineering: B 2003 Vol. 101; Iss. 1-3

Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesised in thin SiO2 layers

M. Carrada, N. Cherkashin, C. Bonafos, G. Benassayag, D. Chassaing, P. Normand, D. Tsoukalas, V. Soncini, A. Claverie
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
101
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(02)00724-9
File:
PDF, 268 KB
english, 2003
Conversion to is in progress
Conversion to is failed