Absorption coefficient of oxide precipitates in silicon...

Materials Science and Engineering: B 2003 Vol. 102; Iss. 1-3

Absorption coefficient of oxide precipitates in silicon wafers after different three-step annealing

A. Sassella, A. Borghesi, P. Geranzani, M. Olmo, M. Porrini
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Volume:
102
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(02)00740-7
File:
PDF, 178 KB
english, 2003
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