Ultrathin oxides for the SCM analysis of sub-micron doping...

Materials Science and Engineering: B 2003 Vol. 102; Iss. 1-3

Ultrathin oxides for the SCM analysis of sub-micron doping profiles

Lorenzo Ciampolini, F Bertin, J.M Hartmann, N Rochat, Ph Holliger, F Laugier, A Chabli
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Volume:
102
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0921-5107(03)00015-1
File:
PDF, 256 KB
english, 2003
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