Low temperature PECVD SiNx films applied in OLED packaging

Weidong Huang, Xuhong Wang, Mei Sheng, Liqiang Xu, Frank Stubhan, Le Luo, Tao Feng, Xi Wang, Fumin Zhang, Shichang Zou

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Volume:

Year:

2003

Language:

english

Pages:

DOI:

10.1016/s0921-5107(03)00045-x

File:

PDF, 399 KB

english, 2003

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