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Low temperature PECVD SiNx films applied in OLED packaging
Weidong Huang, Xuhong Wang, Mei Sheng, Liqiang Xu, Frank Stubhan, Le Luo, Tao Feng, Xi Wang, Fumin Zhang, Shichang ZouVolume:
98
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0921-5107(03)00045-x
File:
PDF, 399 KB
english, 2003