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SOI-structures produced by the silicon direct bonding method
K.L. Enisherlova, T.F. Rusak, E.N. Chervyakova, R.N. VinogradovVolume:
46
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(96)01928-9
File:
PDF, 545 KB
english, 1997