Optimisation of RF magnetron sputtering and...

Materials Science and Engineering: B 1998 Vol. 55; Iss. 1-2

Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array method

Emmanuel Defay, Martine Leberre, Bachir Semmache, Michel Troccaz, Daniel Barbier
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Volume:
55
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0921-5107(98)00172-x
File:
PDF, 477 KB
english, 1998
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