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Structural properties of carbon films deposited by pulsed ArF laser ablation: effects of substrate temperature, bias and H2 pressure
Ahalapitiya Hewage Jayatissa, Fumio Sato, Nobuo Saito, Hiroyuki Ohnishi, Kuniharu Takizawa, Yoichiro Nakanishi, Tomuo YamaguchiVolume:
55
Year:
1998
Language:
english
Pages:
10
DOI:
10.1016/s0921-5107(98)00186-x
File:
PDF, 770 KB
english, 1998