Investigation of titanium nitride films deposited at room...

Materials Science and Engineering: B 1999 Vol. 60; Iss. 3

Investigation of titanium nitride films deposited at room temperature by energetic cluster impact

Chen Jingsheng, Yu Guoqing, Shi Ying, Pan Haochang, Zhu Dezhang, Zheng Zhihao, Xu Hongjie, Yan Fengynan
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Volume:
60
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(99)00027-6
File:
PDF, 347 KB
english, 1999
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