Preparation of stair-step grooves by wet etching of...

Preparation of stair-step grooves by wet etching of AlAs/GaAs heterostructures and MOCVD growth of QWR

S Kicin, J Novák, M Kucera, S Hasenöhrl, P Eliáš, I Vávra, P Hudek
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Volume:
65
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(99)00188-9
File:
PDF, 373 KB
english, 1999
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