Silicidation behaviors of Co/Ti and Co/Hf bilayers on doped...

Silicidation behaviors of Co/Ti and Co/Hf bilayers on doped polycrystalline Si substrate

Youngjae Kwon, Chongmu Lee
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Volume:
65
Year:
1999
Language:
english
Pages:
7
DOI:
10.1016/s0921-5107(99)00329-3
File:
PDF, 219 KB
english, 1999
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