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Thermal history simulation of Czochralski silicon crystals and its application to the study of defects formation during crystal growth
P Hopfgartner, P Collareta, M PorriniVolume:
73
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0921-5107(99)00449-3
File:
PDF, 175 KB
english, 2000